摘要
In_2O_3∶SnO_2(ITO)thinfilmswerefabricatedonthesubstrateofflexiblepolyethyleneterephthalate(PET)byDCmagnetronsputteringfromaceramictargetofIn_2O_3/SnO_2(90∶10).PropertiesofthethinfilmswerecharacterizedbyX-raydiffraction(XRD),four-pointprobe,Hall-effectmeasurement,UV-Visspectrophotometer,andscanningelectronmicroscopy(SEM).Theeffectsofsputteringpressure,oxygenpartialpressureanddepositiontemperatureonpropertiesofmicrostructureandoptoelectronicspropertiesofPET/ITOthinfilmswereinvestigatedindetail.High-qualityITOthinfilmsonPETsubstrateswiththeresistivityaslowas8.5×10-4Ω·cmandtheopticaltransmittanceover80%inthevisiblespectrumrangewereobtained.
出版日期
2010年01月11日（中国期刊网平台首次上网日期，不代表论文的发表时间）
