简介：Theeffectofλ/2SiO2overcoatonthelaserdamagecharacteristicsofHfO2/SiO2high-reflector(HR)coatingsisinvestigatedwith1-on-1andN-on-1laserdamagetestmethods.Thelaserdamagesurfaceof1-on-1isanalyzedbyastepanalyzer.ThesurfacemorphologiesshowthatlaserdamagemakesthecoatingdamagedareaprotrudentandroughforHRcoatingwithoutλ/2silicaovercoat,butconcaveandsmoothforHRcoatingwithλ/2silicaovercoat.Theresultof10-on-1multi-pulseirradiationonthesamepointofthecoatingshowsthatthereisanenergydensitystageonthedamagecurve.Ifthelaserenergydensityiswithintherangeofthestage,HfO2/SiO2HRcoatingswithλ/2silicaovercoatwillnotbedamagedmorethan2timesformulti-shots,andthesurfacedamagesareveryslightsothatthereisnoimpactonthecoatingperformance.Anotherinterestingresultisthattheenergydensitystageextendsfromthedamagethresholdtothepointofabout3timesofthreshold,whichissimilartotheeffectofthelaserconditiononcoating.