简介:Outsidesurfacefluctuationsofinertialconfinementfusion(ICF)capsulegreatlyaffecttheimplosionperformance.Anatomicforcemicroscope(AFM)-basedprofilometerisdevelopedtopreciselycharacterizethecapsulesurfacewithnanometerresolution.Withthestandardninesurfaceprofilesandthecompletecoveragedata,1Dand2Dpowerspectraareobtainedtoquantitativelyqualifythecapsule.Capsulecenterfastaligning,orbittracesautomaticrecording,3Dcapsuleorientationhavebeenstudiedtoimprovetheaccuracyandefficiencyoftheprofilometer.