简介:Thecombinationofdeepwetetchingandamagneto-rheologicalfinishing(MRF)processisinvestigatedtosimultaneouslyimprovelaserdamageresistanceofafused-silicasurfaceat355nm.ThesubsequentlydepositedSiO2coatingsareresearchedtoclarifytheimpactofsubstratefinishingtechnologyonthecoatings.Itisrevealedthatadeepremovalproceedingfromthesinglesideordoublesidehadasignificantimpactonthelaser-induceddamagethreshold(LIDT)ofthefusedsilica,especiallyfortherearsurface.Afterthedeepetching,theMRFprocessthatfolloweddoesnotactuallyincreasetheLIDT,butitdoesamelioratethesurfacequalitieswithoutadditionalLIDTdegradation.Thecombinationguaranteeboththeintegrityofthesurface’sfinishandthelaserdamageresistanceofthefusedsilicaandsubsequentSiO2coatings.