简介：Thecopolymersofchloroethylmethacrylate(CMA),glycidylmethacry-late(GMA),andmethylmethacrylate(MMA)weresynthesizedinbenzenesolution.Theirbreadthsofthemolecularweightdistributionsare2.1and2.3,respectivelyThether-malstabilityofP(GMA-CMA)issuperiortothatofP(CMA-MMA).TheresolutionsofP(CMA-MMA)andP(GMA-CMA)photoresistswerefoundtobe0.1～0.16μmand0.17～0.2μm,respectively.
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