简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.
简介:Thisworkinvestigatesinternalplasmaprocessparametersusingahairpinresonanceprobeandopticalemissionspectroscopy.ThedependenceofelectrondensityandatomicfluorineonthepercentageofoxygeninanSF6/O2dischargewasmeasuredusingthesemethods.AnRIEOxfordInstruments80pluschamberwasusedfortheexperiments.Twodifferentprocesspowers(100Wand300W)ataconstantpressure(100mTorr)wereused,anditwasfoundthattheopticalemissionintensityofthe703.7nmand685.6nmlinesofatomicfluorineincreasedrapidlyasoxygenwasaddedtotheSF6discharge,reachedtheirmaximumatanO2fractionof20%andthendecreasedwithfurtheradditionofoxygen.TheplasmaelectrondensitywasalsostronglyinfluencedbytheadditionofO2.
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简介:利用角分辨紫外光电子谱对乙烯和乙炔气体在Ru(1010)表面的吸附及与K的共吸附的研究结果表明:当衬底温度超过200K,乙烯即发生脱氢反应,σCH和σCC能级均向高结合能方向移动。在室温下,σCH和σCC能级位置与乙炔在Ru(1010)表面的吸附时的分子能级完全一致。乙烯发生脱氢反应后的主要产物为乙炔。衬底温度从120K到室温,Ru(1010)表面上乙炔的σCH和σCC能级均未发现变化。室温下乙炔仍然可以在Ru(1010)表面以分子状态稳定吸附。在有K的Ru(1010)表面上,室温时σCC谱峰几乎。碱金属K的存在促进了乙炔的分解。
简介:利用XRD、TPR和EXAFS等手段考察了焙烧温度对Cu/MnO2/ZrO2催化剂性能影响,结果表明,随着焙烧温度增加,铜的配位环境发生变化,铜和锰之间相互作用增强,有效地防止铜组分在还原及反应过程中聚集长大,从而使催化剂活性显著增加,当催化剂经过高温焙烧,催化剂活性由于ZrO2结晶和铜的聚集而降低。
简介:Anewtwo-dimensionalstructuremodulationalongc-andb-axeshasbeendiscoveredinsuperconductingsinglecrystalsofBi2.13Sr1.87CuO6+δ(Bi2201)byx-rayscattering.Suchmodulationstructuredoesnotexistinnon-superconductingBi2201singlecrystals.Butinsteadlatticedistortionsareobservedinthea-b-plane.Thisphenomenonmayindicatethatbothstrainrelaxationandchargemodulationinthea-b-planeareimportanttotheoccurrenceofsuperconductivityinthecopperoxides.
简介:Edgeplasmacharacteristicswerestudiedbyafast-scanning4-probearrayandaMach/Reynoldsstress/Langmuir10-probemovablearrayintheboundaryregion.Theseprobescouldmeasuretheedgeplasmatemperature,density,poloidalelectricfield,radialelectricfield,Reynoldsstress,poloidalrotationvelocitiesandtheirprofiles,whichcouldbeobtainedbychangingtheradialpositionsoftheprobearrayshotbyshot.Themeasuredresultswereusedtoanalyseplasmaconfinement,turbulentfluctuationsandcorrelations.Thefixedflush3-probearraysweremountedonthe4-divertorneutralizationplatesatthesametoroidalcross-sectioninthedivertorchamber.Theseprobeswereusedtomeasuretheprofilesoftheelectrontemperature,densityandfloatpotentialinthedivertorchamber.Edgeplasmabehavioursinbothlimiterconfigurationanddivertorconfigurationarecompared.Thedecaylengthsoftheedgetemperatureanddensityweremeasuredandisemphasizedforplasmabehavioursofthesupersonicmolecularbeaminjectionandlowerhybridcurrentdrive.ThedependenceoftheradialgradientofReynoldsstressonthepoloidalflowandtheradialgradientoftheelectricfieldonturbulentlossarediscussed.
简介:TooptimizetheoperationparametersofthebeamlineofNBIonHL-2A,featuresofthebeamline,includingthebeamprofileandthepowerdepositedoncomponentsandinjectedintothetokamakplasma,weremeasured.Theoperationalparametersofthefoursourcesonthebeamlinewereoptimizedwiththemonitorofthebeamprofileandbeampower,andthetransmissionefficiencyoftheNBIinjectedpowerwasthereforeincreased.AbeamdiagnosticsystemforthebeamlineoftheNBIsystemonHL-2Aaswellasthediagnosedresultswasalsopresented.
简介:用EXAFS方法研究了重金属Zn(Ⅱ)在δ-MnO2上吸附的微观结构及吸附机制。在pH5.50,0.1M硝酸钠介质中,吸附-解吸实验表明Zn(Ⅱ)在δ-MnO2上的吸附可逆性很高.EXAFS结果表明,δ-MnO2表面上吸附态Zn2+以六配位的水合离子八面体形式存在。八面体的水合Zn^2+离子与δ-MnO2的结构单元MnO6八面体通过共用O原子结合,形成角-角结合的弱吸附.Zn-O平均原子间距为2.071A,Zn-Mn平均原子间距为3.528A。同一条等温线上随着吸附量增加,角-角结合的弱吸附形式基本上没有变化。Zn(Ⅱ)在δ-MnO2上较高的吸附可逆性是由于吸附态Zn(Ⅱ)与δ-MnO2以弱吸附的角-角形式结合所导致的。