简介:Wehavesuccessfullydemonstratedthathighqualityandhighdielectricconstantlayerscanbefabricatedbylowtemperaturephoto-inducedor-assistedprocessing.Ta2O5andZrO2havebeendepositedatt<400℃bymeansofaUVphoto-CVDtechniqueandHfO2byphoto-assistedsol-gelprocessingwiththeaidofexcimerlamps.TheUVannealingofas-grownlayerswasfoundtosignificantlyimprovetheirelectricalproperties.Lowleakagecurrentdensitiesontheorderof10-8A/cm2at1MV/cmfordepositedultrathinTa2O5filmsandca.10-6A/cm2forthephoto-CVDZrO2layersandphoto-irradiatedsol-gelHfO2layershavebeenreadilyachieved.TheimprovementintheleakagepropertiesoftheselayersisattributedtotheUV-generatedactiveoxygenspeciesO(1D)whichstronglyoxidizeanysuboxidestoformmorestoichiometricoxidesonremovingcertaindefects,oxygenvacanciesandimpuritiespresentintheas-preparedlayers.Thephoto-CVDTa2O5filmsdepositedacross10.16-cmSiwafersexhibitahighthicknessuniformitywithavariationoflessthan±2.0%beingobtainedforultrathinca.10nmthickfilms.Thelamptechnologycaninprinciplebeextendedtolargerareawafers,providingapromisinglowtemperatureroutetothefabricationofarangeofhighqualitythinfilmsforfutureULSItechnology.
简介:Twocalix[4]arenederivativescontaining1,2,3-triazolemoietyweresynthesizedviaK2CO3-catalyzed1,3-dipolarcycloadditionreactionbetweencalix[4]arene-basedazideandactivemethylenecompoundsingoodyields.Thestructuresofthetwocompoundssynthesizedhereinwerefullyconfirmedby1HNMR,,13CNMR,andMS(ESI).Thethermalanalysisshowedthatthemasslossesofthesynthesizedcompounds4and5containing1,2,3-triazolegroupsaresimilartoeachother.
简介:Yb3+complexeswithtwonitrilotriaceticacidmoleculeswerepreparedandtheircompositionsweredeterminedasK3[Yb(nta)2(H2O)]*5H2OandNa3[Yb(nta)2]*6H2Obyelementalanalyses.Theirstructureswerecharacterizedbysingle-crystalX-raydiffractionanalyses.IncomplexK3[Yb(nta)2(H2O)]*5H2O,theYbN2O7partformsanine-coordinatemonocappedsquareantiprismaticstructure.IncomplexNa3[Yb(nta)2]*6H2O,theYbN2O6partformsaneight-coordinatesquareantiprismaticstructure.Itcanbeseenthattheoutercations(K+andNa+)greatlyaffectthecoordinationnumberandcoordinatestructurefromtheseresults.