AN UNCONDITIONALLY STABLE HYBRID FE-FD SCHEME FOR SOLVING A 3-D HEAT TRANSPORT EQUATION IN A CYLINDRICAL THIN FILM WITH SUB-MICROSCALE THICKNESS-中国期刊网

摘要 Heattransportatthemicroscaleisofvitalimportanceinmicrotechnologyapplications.Theheattransportequationisdifferentfromthetraditionalheattransportequationsinceasecondorderderivativeoftemperaturewithrespecttotimeandathird-ordermixedderivativeoftemperaturewithrespecttospaceandtimeareintroduced.Inthisstudy,wedevelopahybridfiniteelement-finitedifference(FE-FD)schemewithtwolevelsintimeforthethreedimensionalheattransportequationinacylindricalthinfilmwithsubmicroscalethickness.Itisshownthattheschemeisunconditionallystable.Theschemeisthenemployedtoobtainthetemperatureriseinasub-microscalecylindricalgoldfilm.Themethodcanbeappliedtoobtainthetemperatureriseinanythinfilmswithsub-microscalethickness,wherethegeometryintheplanardirectionisarbitrary.

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AN UNCONDITIONALLY STABLE HYBRID FE-FD SCHEME FOR SOLVING A 3-D HEAT TRANSPORT EQUATION IN A CYLINDRICAL THIN FILM WITH SUB-MICROSCALE THICKNESS

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AN UNCONDITIONALLY STABLE HYBRID FE-FD SCHEME FOR SOLVING A 3-D HEAT TRANSPORT EQUATION IN A CYLINDRICAL THIN FILM WITH SUB-MICROSCALE THICKNESS

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