Synthesis of a Large Diamond Crystal with a Smooth (100) Facet at its Top Through MPCVD

(整期优先)网络出版时间:2013-11-21
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Alargediamondcrystalupto500μmindiameterwithasmooth(100)facetatitstophasbeensynthesizedonMosubstratethroughmicrowaveplasmachemicalvapordeposition(MPCVD).Itsmorphologyandqualitywerecharacterizedbyscanningelectronmicroscopy(SEM),andthegrowthmechanismwasroughlyillustratedfrombothmacroscopicandmicroscopicviewpoints.Itwasfoundthatmorphologicalinstabilitiesareamajorfactorresultinginsynthesisoflargediamondcrystals,moreover,highmicrowavepowerdensity(MPD),highCH4concentrations,highpressure,highsubstratesurfacetemperatureandtheadditionofasmallamountofO2werealsonecessaryforthesynthesisoflargediamondcrystals.