Correlation of polishing-induced shallow subsurface damages with laser-induced gray haze damages in fused silica optics

(整期优先)网络出版时间:2016-08-18
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Laser-induceddamageinfusedsilicaopticsgreatlyrestrictstheperformancesoflaserfacilities.Grayhazedamage,whichisalwaysinitiatedonceriapolishedoptics,isoneofthemostimportantdamagemorphologiesinfusedsilicaoptics.Inthispaper,thelaser-inducedgrayhazedamagesoffourfusedsilicasamplespolishedwithCeO_2,Al_2O_3,ZrO_2,andcolloidalsilicaslurriesareinvestigated.Foursamplesallpresentgrayhazedamageswithmuchdifferentdamagedensities.Then,thepolishing-inducedcontaminantandsubsurfacedamagesinfoursamplesareanalyzed.TheresultsrevealthatthegrayhazedamagescouldbeinitiatedonthesampleswithoutCecontaminantandareinclinedtoshowatightcorrelationwiththeshallowsubsurfacedamages.