Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators

(整期优先)网络出版时间:2016-05-15
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Anoveldesignofatwo-axisfaststeeringmirror(FSM)withpiezoelectricactuatorsisproposedforincoherentlaserbeamcombination.ThemechanicalperformanceoftheFSMistested.Theresultsshowthatthetiltingrangeofthemirrorisabout4mrad,andthe1st-orderresonancefrequencyisabout250Hz.Aself-designedgratingencoderistakenasthesensor,whichensurestheoptimalprecisionof10μrad.Thenovelmechanicaldesigncanmeettherequirementofengineeringinincoherentlaserbeamcombination.