YBa2Cu3Ox(YBCO)thinfilmsgrownondifferentsubstrateswithand/orwithoutEu2CuO4(ECO)bufferlayerwereinvestigatedbyX-raywideanglediffraction,reflection,diffusescatteringandtopography.TheresultsshowthatfortheyttriastabilizedZrO2(YSZ)substrate,thepresenceofanECObufferlayerimprovesthecrystallinequalityoftheYBCOfilm,whileanegativeeffectisobservedfortheSrTiO3(STO)substrate.ThelateralcorrelationlengthforasamplegrownonaYSZsubstratewithECObufferLayerismuchgreaterthangrownonanSTOsubetrate.TheSTOsubstrateusedhasmosaicstructure.2001ElsevierScienceB.V.Allrightsreserved.