“Streamofvariation(SoV)”methodologyformultistagemachiningprocesses.Amodelreductionmethodformonitoringlarge-scaleprocesses.AsimplewaytodigestSPC.Astatisticalapproachtoimprovewaferfabricationyield.Astatisticalprocesscontrolapproachforestimatingthewarm-upperiod.
自动化技术：英文版
2005年2期
