3-D profile measurement for complex micro-structures

(整期优先)网络出版时间:2005-03-13
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Micro-structures3-Dprofilemeasurementisanimportantmeasurementcontentforresearchonmicro-machiningandcharacterizationofmicro-dimension.Inthispaper,anewmethodinvolved2-Dstructuretemplate,whichguidesphaseunwrapping,isproposedbasedonphase-shiftingmicroscopicinterferometry.Itisfitnotonlyforstaticmeasurement,butalsofordynamicmeasurement,especiallyformotionofMEMSdevices.3-Dprofileofactivecombofmicro-resonatorisobtainedbyusingthemethod.Thetheoreticprecisioninout-of-planedirectionisbetterthan0.5nm.Thein-planetheoreticprecisioninmicro-structuresisbetterthan0.5μm.Butattheedgeofmicro-structures,itisonthelevelofmicrometermainlycausedbyimpreciseedgeanalysis.Finally,itsdisadvantagesandthefollowingdevelopmentarediscussed.