Study of Preionization XeCl Excimer Laser and Ultraviolet Spectrum Characteristic

(整期优先)网络出版时间:2006-05-15
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ThepumpedsystemoftheXeC1excimerlaserhasbeendesignedandappliedtoanalyzeUVXeCllaserspectroscopycharacteristics.UndertheproportionofmixedgasofHCl:Xe:He=0.1%:1%:98.9%,excimerlaserlightwasgeneratedbystableglowdischargeprocess.Thelaserspectrum,pulseduration,andlaserpowerpropertieswereobtained.TheresultshowsthatthisXeClexcimerlaserexhibitsuniquespectralproperties,withtwopeaksbetween307.7nmand308.5nmathighpressurewithapumpedpowerof1.3959MW/cm~3.ThetransitionreliesonthestrongesttransitionsbetweenB-XandC-X.Themaximum-intensitytransitionofspectroscopyisBtoXenergylevels.Thelaserparametersareasfollows:minimaldurationof15.42ns,arepetitionratefrom0.5Hzto5Hz,singlepulsestablepowerof400mJ,andbeampergenceangleof3mrad.ThelasercanbeusedtostudyUVspectroscopy,laserablationsamplingandsputteredpinnateform.