简介:
简介:利用角分辨紫外光电子谱对乙烯和乙炔气体在Ru(1010)表面的吸附及与K的共吸附的研究结果表明:当衬底温度超过200K,乙烯即发生脱氢反应,σCH和σCC能级均向高结合能方向移动。在室温下,σCH和σCC能级位置与乙炔在Ru(1010)表面的吸附时的分子能级完全一致。乙烯发生脱氢反应后的主要产物为乙炔。衬底温度从120K到室温,Ru(1010)表面上乙炔的σCH和σCC能级均未发现变化。室温下乙炔仍然可以在Ru(1010)表面以分子状态稳定吸附。在有K的Ru(1010)表面上,室温时σCC谱峰几乎。碱金属K的存在促进了乙炔的分解。
简介:利用XRD、TPR和EXAFS等手段考察了焙烧温度对Cu/MnO2/ZrO2催化剂性能影响,结果表明,随着焙烧温度增加,铜的配位环境发生变化,铜和锰之间相互作用增强,有效地防止铜组分在还原及反应过程中聚集长大,从而使催化剂活性显著增加,当催化剂经过高温焙烧,催化剂活性由于ZrO2结晶和铜的聚集而降低。
简介:ThisworkinvestigatedC2F6/O2/ArplasmachemistryanditseffectontheetchingcharacteristicsofSiCOHlow-kdielectricsin60MHz/2MHzdual-frequencycapacitivelycoupleddischarge.FortheC2F6/Arplasma,theincreaseinthelow-frequency(LF)powerledtoanincreasedionimpact,promptingthedissociationofC2F6withhigherreactionenergy.Asaresult,fluorocarbonradicalswithahighF/Cratiodecreased.Theincreaseinthedischargepressureledtoadecreaseintheelectrontemperature,resultinginthedecreaseofC2F6dissociation.FortheC2F6/O2/Arplasma,theincreaseintheLFpowerpromptedthereactionbetweenO2andC2F6,resultingintheeliminationofCF3andCF2radicals,andtheproductionofanF-richplasmaenvironment.TheF-richplasmaimprovedtheetchingcharacteristicsofSiCOHlow-kfilms,leadingtoahighetchingrateandasmoothetchedsurface.
简介:Edgeplasmacharacteristicswerestudiedbyafast-scanning4-probearrayandaMach/Reynoldsstress/Langmuir10-probemovablearrayintheboundaryregion.Theseprobescouldmeasuretheedgeplasmatemperature,density,poloidalelectricfield,radialelectricfield,Reynoldsstress,poloidalrotationvelocitiesandtheirprofiles,whichcouldbeobtainedbychangingtheradialpositionsoftheprobearrayshotbyshot.Themeasuredresultswereusedtoanalyseplasmaconfinement,turbulentfluctuationsandcorrelations.Thefixedflush3-probearraysweremountedonthe4-divertorneutralizationplatesatthesametoroidalcross-sectioninthedivertorchamber.Theseprobeswereusedtomeasuretheprofilesoftheelectrontemperature,densityandfloatpotentialinthedivertorchamber.Edgeplasmabehavioursinbothlimiterconfigurationanddivertorconfigurationarecompared.Thedecaylengthsoftheedgetemperatureanddensityweremeasuredandisemphasizedforplasmabehavioursofthesupersonicmolecularbeaminjectionandlowerhybridcurrentdrive.ThedependenceoftheradialgradientofReynoldsstressonthepoloidalflowandtheradialgradientoftheelectricfieldonturbulentlossarediscussed.