简介：Alowpoweratmosphericpressureplasmajetdrivenbya24kHzACpowersourceandoperatedwithaCH4/airgasmixturehasbeeninvestigatedbyopticalemissionspectrometer.Theplasmaparametersincludingtheelectronexcitationtemperature,vibrationaltemperatureandrotationaltemperatureoftheplasmajetatdifferentdischargepowersarediagnosedbasedontheassumptionthatthekineticenergyofthespeciesobeystheBoltzmanndistribution.TheelectrondensityatdifferentpowerisalsoinvestigatedbyHβStarkbroadening.Theresultsshowthattheplasmasourceworksundernon-equilibriumconditions.Itisalsofoundthatthevibrationaltemperatureandrotationaltemperatureincreasewithdischargepower,whereastheelectronexcitationtemperatureseemstohaveadownwardtrend.Theelectrondensityincreasesfrom0.8×1021m-3to1.1×1021m-3whenthedischargepowerincreasesfrom53Wto94W.