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Rapidly Synthesis of Nanocrystalline Diamond Films by Helicon Wave Plasma

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摘要 AnewtechniqueofthesynthesisofNanocrystallineDiamond(NCD)Filmsbyheliconwaveplasma(HWP)chemicalvapordepositionatroomtemperaturewasreported.ThegrowthmorphologyandtheroughnessofNCDsampleswascharacterizedusingfiledemissionscanningelectronmicroscopy(SEM-SU8010)andatomforcemicroscopy(AFM),respectively.Theresultsshowthegrowthrateofthefilmwasveryfast,about833nm/min.TypicalG,Dbands

DOI pj0k9n2w4y/1719751

作者 Jun Yu;Tianyuan Huang;Peiyu Ji;Chenggang Jin;Lanjian Zhuge;Xuemei Wu

机构地区不详

出处《功能材料信息》 2016年2期

关键词英语阅读理解纳米材料与技术

分类 [一般工业技术][材料科学与工程]

出版日期 2016年02月12日（中国期刊网平台首次上网日期，不代表论文的发表时间）

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英语阅读理解纳米材料与技术

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