Strip-loaded waveguide-based optical phase shifter for high-efficiency silicon optical modulators-中国期刊网

摘要 Weproposeanovelsiliconopticalphaseshifterstructurebasedonheterogeneousstrip-loadedwaveguidesonaphotonicsilicononinsulator(SOI)platform.ThefeaturesofanetchlessSOIlayerandloadedstripwouldenhancetheperformanceanduniformityofsiliconopticalmodulatorsonalarge-scalewafer.WeimplementedthephaseshifterbyloadinganamorphoussiliconstripontoanSOIlayerwithaverticalPNdiodestructure.ComparedtotheconventionallateralPNphaseshifterbasedonhalf-etchedribwaveguides,thisphaseshiftershowsa>1.5timesenhancementofmodulationefficiencyandprovides>20GHzhigh-speedoperation.

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Strip-loaded waveguide-based optical phase shifter for high-efficiency silicon optical modulators

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Strip-loaded waveguide-based optical phase shifter for high-efficiency silicon optical modulators

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