Silicon Epitaxial Wafer for X Band Double Read－type DDR IMPATT Diodes by Atmosphere／Low Pressure Growth Techniqt-中国期刊网

摘要ＳｉｌｉｃｏｎＥｐｉｔａｘｉａｌＷａｆｅｒｆｏｒＸＢａｎｄＤｏｕｂｌｅＲｅａｄ－ｔｙｐｅＤＤＲＩＭＰＡＴＴＤｉｏｄｅｓｂｙＡｔｍｏｓｐｈｅｒｅ／ＬｏｗＰｒｅｓｓｕｒｅＧｒｏｗｔｈＴｅｃｈｎｉｑｔＷａｎｇＸｉａｎｇｗｕａｎｄＬｕＣｈｕｎｙｉ王向武，陆春...

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Silicon Epitaxial Wafer for X Band Double Read－type DDR IMPATT Diodes by Atmosphere／Low Pressure Growth Techniqt